AP3571 & 4571, Diaphragm Valve, Air Operated, Two Step
Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch.
Two step mode - metered flow and full open
Two separate actuation ports
Soft start valve to minimize vacuum chamber pressurization turbulence
Metered flow adjustable
Pneumatically actuated normally closed
Body material: 316L SS secondary remelt
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Series AP is an ultra high purity (UHP) diaphragm valve for gas delivery in semiconductor and other clean industries. The series is available in air operated and manually operated valves with low and high pressures. Available options include Hastelloy® C22, 316L SS secondary remelt, and the choice of normally closed or normally open indicator switch. 